• Productivity: 1000 MW/year(M2-M12)

• Fully automated, no contamination, high throughput and in-line

• One unit to process I/N/I/P four layers
• Productivity: ＞5000 wafers/hour (M2-M12)

• Fully automated, no contamination, high throughput and in-line

• One unit to process I/N/I/P four layers
• Productivity: 3000 wafers/hour (M2-M4)

• Fully automated, no contamination, high throughput and in-line

• One unit to process I/N/I/P four layers
• Productivity: 1500 wafers/hour (M2-M4)

  Fast ramping up production: Identical reactors and process recipes for R&D and Mass production tools, therefore, the R&D recipes can be direct transferred into production tool.

  Advanced Vacuum-in-vacuum chamber design

  Advanced RF matching system: Plasma stabilized within 0.3 seconds with either 13.56 or 40.68 MHz

  We have increased six new customers in high efficiency SHJ manufacture during 2019-2020 period,.  Among them three of them are considered as first tier by Bloomberg 

  Customer obtained 26.30% efficiency（ISFH certified）with M6 wafer
  Average production efficiency 24.5%