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High Efficiency Solar Cells Equipment & Technology

PECVD Products Series for SHJ Solar cells

• Productivity: 500 MW/year(M2-M6)

Fully automated, no contamination, high throughput and in-line

• One unit to process I/N/I/P four layers
• Productivity: >5000 wafers/hour (M2-M12)

Fully automated, no contamination, high throughput and in-line

• One unit to process I/N/I/P four layers
• Productivity: 3000 wafers/hour (M2-M4)

Fully automated, no contamination, high throughput and in-line

• One unit to process I/N/I/P four layers
• Productivity: 1500 wafers/hour (M2-M4)

Unique Features & recent progress:

  Fast ramping up production: Identical reactors and process recipes for R&D and Mass production tools, therefore, the R&D recipes can be direct transferred into production tool.

  Advanced Vacuum-in-vacuum chamber design

  Advanced RF matching system: Plasma stabilized within 0.3 seconds with either 13.56 or 40.68 MHz

  We have increased six new customers in high efficiency SHJ manufacture during 2019-2020 period,.  Among them three of them are considered as first tier by Bloomberg 

  Customer obtained 25.11% efficiency(ISFH certified)with M2 wafer
  Average production efficiency 24.3%

Customer uses our PECVD tool to reach a new world record of 25.11% SHJ efficiency(ISFH certified)

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Address: 8F,Building A1,Lane 2555,Xiupu Road,Pudong,Shanghai
Shanghai Phone: 021-20791515