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Author: Site Editor Publish Time: 2012-04-27 Origin: Site
由理想能源公司成功研发并生产的单腔室PECVD研发设备今已成功运抵客户厂房开始装机。
理想能源公司的单腔室PECVD设备（PE-TB800）适用于非晶、微晶或锗硅等单结/多结薄膜电池的工艺研发。其研发结果可直接导入大规模生产。该设备采用了独特的甚高频系统及先进的“双真空”设计，沉积环境重复、稳定、可靠。
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